The interferoMETER 5400-DS and 5600-DS absolute interferometers are used for distance measurement with nanometer accuracy. Our Clusterpartner Micro-Epsilon has now expanded it's product group to include new sensors with a large offset distance of 10 mm. These are designed for high-precision applications in clean room environments and in a vacuum, for example for measurements on coated wafers. A non-magnetic titanium UHV version also allows for use in strong magnetic fields, for example in MRI scanning or electron beam microscopes.
Fig. 1: The interferoMETER 5400-DS and 5600-DS from Micro-Epsilon
The design with a 90° beam path significantly reduces the required installation depth. Linearities of < ±50 nm or < ±10 nm are possible, depending on the choice of controller. The innovative absolute interferometers have extensive connection options for optimal integration into various control systems and production programs. They include digital interfaces such as Ethernet, EtherCAT, RS422, PROFINET and EtherNet/IP as well as an analog output. The entire configuration of the controller and its sensors is carried out as usual via the web interface without additional software.
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